diaphragm compressor for polysilicon production plants

Diaphragm compressors are the ideal solution for compressing high purity gases in demanding industrial and scientific applications. The diaphragm separates the gas from potential sources of contamination, such as lubricating oil, ensuring compressed gas purity up to 99.999%. This technology is suitable for high-pressure, complex gas types and any scenario where gas quality is critical.

Features of Diaphragm Compressor

1. High purity compression: No contact with lubricating oil, making diaphragm compressors perfect for rare gases, medical gases, and semiconductor manufacturing.
2. Good sealing and no pollution: The compression chamber is completely isolated, preventing contamination and leakage—ideal for industries demanding ultra-high gas purity.
3. Adaptable pressure matching: Multiple models (H, D, L, V, Z, etc.) and one to three-stage compression options ensure full market coverage for various pressure requirements.
4. High pressure, large compression ratio: Stable operation under large compression ratios, perfect for applications with high demands on compression efficiency.
5. Applicable to a variety of gases: Can compress hydrogen, nitrogen, oxygen, helium, xenon, krypton, hydrogen chloride, hydrogen sulfide, hydrogen fluoride, nitrogen trifluoride, silicon tetrafluoride, silane, and more for diverse industries.

Working Principle of Diaphragm Compressor

The diaphragm compressor uses a flexible diaphragm to isolate the compression chamber from the environment. When compressing gas, the diaphragm is displaced by a drive system, compressing the gas without any lubricant contact.

1. Compression process: The diaphragm’s contraction and expansion change the volume in the chamber, compressing the gas efficiently and cleanly.
2. Sealing characteristics: Durable diaphragm materials and complete isolation prevent leaks and contamination, ensuring high purity and safety.

Applicable Working Conditions

• Rare gas filling: Efficient, contamination-free compression of helium, neon, xenon, etc., for medical, scientific, and aerospace uses.
• Scientific research installations: Delivers high purity gas for experimental analysis in research devices, ensuring stable and clean gas supply.
• Process pilot plants: Provides precisely controlled, contamination-free gas flow for pilot production and process development.
• Small flow rate gas compression: Ideal for precision manufacturing and special gas filling where low flow, high purity, and stable operation are critical.

Application Areas

1. Hydrogen energy industry: Key for hydrogen compression and storage in energy, mobility, and clean energy sectors.
2. Silicon and semiconductor industry: Ensures uncontaminated high-purity gases (nitrogen, argon, etc.) for semiconductor manufacturing.
3. Fluorine chemical and petrochemical: Handles high-pressure, high-purity gases like hydrogen chloride and hydrogen fluoride for chemical industries.
4. Pharmaceutical industry: Compresses medical gases (oxygen, nitrogen, nitrous oxide) to meet stringent purity standards.
5. Aerospace and nuclear power: Provides specialty gas compression (helium, xenon, etc.) for high-stakes environments requiring top-level purity and safety.
6. Research and laboratory applications: Supplies contamination-free gases for mass spectrometry, gas chromatography, and other research uses.

Customization of Diaphragm Compressor

We offer fully customized diaphragm compressors tailored to your specific site and application requirements. With flexible configurations and adaptive designs, we ensure efficient, safe, and reliable gas compression for every industrial scenario.