pm vsd screw vacuum pump with oil for laser processing

Permanent magnet frequency conversion screw vacuum pump is a kind of high-efficiency vacuum extraction equipment with permanent magnet synchronous motor drive and frequency conversion speed control technology, combining screw compression principle and advanced frequency conversion control technology.

Description

Permanent magnet frequency conversion screw vacuum pumps are engineered for high efficiency, energy saving, low noise, and exceptional stability. Widely used in semiconductor manufacturing, chemical processing, food packaging, and more, these pumps deliver reliable vacuum performance while minimizing lubricant loss and environmental pollution.

Features of Permanent Magnet Frequency Conversion Screw Vacuum Pump

  1. Power range: 7.5 to 90 kW, suitable for various industrial applications.
  2. Pumping rate: 10 to 90 m³/min, offering a wide range of flow options to meet different process needs.
  3. High vacuum: Achieves vacuum levels up to 29.9 inHg (0.5 Torr), ideal for demanding vacuum applications.
  4. Energy efficiency: Frequency conversion speed control technology minimizes energy loss, especially under high vacuum conditions.
  5. High-efficiency separation: Two-stage separation reduces lubricating oil loss and protects the environment.
  6. Permanent magnet synchronous motor: No excitation current required, ensuring high efficiency—particularly at low loads for significant energy savings.
  7. Advanced frequency control: Adjusts pump speed according to actual load, maintaining constant system vacuum and reducing energy waste.
  8. Low noise and vibration: Stable operation and low noise make it suitable for noise-sensitive workplaces.
  9. Reliable lubrication system: Lubricating oil ensures smooth operation of screws and key parts, reducing wear and extending service life.

Working Principle

Utilizing screw compression technology, a permanent magnet synchronous motor drives precision screw rotors to compress gas. The process involves:

  1. Suction: The rotating screw draws gas in through the suction port.
  2. Compression: Gas is gradually compressed in the rotor groove, increasing its pressure as the volume decreases.
  3. Exhaust: Compressed gas is discharged continuously into the external system, maintaining vacuum stability.

The built-in frequency conversion control system automatically adjusts motor speed based on actual demand, optimizing energy use and maintaining stable vacuum under varying conditions.

Application Areas

  • Semiconductor industry: Provides precise, stable high vacuum for semiconductor manufacturing, ensuring high product quality and efficiency.
  • Chemical industry: Supports chemical reactions and gas extraction, especially when handling volatile solvents or corrosive gases.
  • Food packaging: Maintains low vacuum during packaging and preservation to extend product shelf life and save energy.
  • Pharmaceutical industry: Used in drying, concentration, and vacuum packaging processes to ensure product safety and quality.
  • Photovoltaic industry: Essential for vacuum coating and PVD processes in the production of photovoltaic materials.
  • Environmental protection: Efficient for exhaust treatment and pollutant extraction, reducing oil loss and environmental impact.
  • Laser processing: Maintains stable vacuum for laser cutting and engraving, ensuring efficient laser operation.