roots screw vacuum pump unit for semiconductor manufacturing

The Roots screw vacuum pump unit combines the strengths of Roots pumps and screw pumps, offering a clean, efficient, and oil-free vacuum solution for demanding industrial and laboratory applications. With a gap seal design and no lubricating oil, these pumps maintain high purity and exceptional performance throughout operation.

Working Principle of Roots Screw Vacuum Pump Unit

• Screw vacuum pump (pre-stage): Functions as the pre-stage pump, providing high pumping rates and low exhaust pressure. Mechanical compression via precise screw gaps ensures efficient, low-noise, and low-vibration operation.
• Roots vacuum pump (main/intermediate): Synchronously rotating dual rotors transfer exhaust gas from the suction to the exhaust chamber. Gap sealing prevents oil contamination, maintaining a clean vacuum environment.
• Series operation: Both pumps work in series, with the screw pump enhancing vacuum level and the Roots pump ensuring stable, continuous pumping efficiency.

Performance Advantages

1. Energy-saving: Optimized ratio of pumping speed and vacuum degree reduces power consumption, outperforming traditional vacuum systems in energy efficiency.
2. High efficiency: Achieves over 90% pumping efficiency, delivering high vacuum levels with low energy use for various processes.
3. Safety protection: Advanced control system with auto start/stop, overload, overcurrent, and water cut-off protection ensures long-term stability.
4. Compact design: Vertical stacking or ladder structure minimizes footprint, ideal for space-limited factories and labs.
5. Flexible configuration: Adjustable pumping speed ratio between pumps (1:2 to 1:8) to adapt to diverse working requirements.
6. Anti-corrosion performance: Overflow surfaces are treated or made from corrosion-resistant materials, suitable for extracting corrosive gases and operation in harsh environments.

Application Fields

• Chemical industry: Extraction of volatile organic solvents, gases, and for use in vacuum reactors—widely used in chemical and pharmaceutical processes.
• Semiconductor manufacturing: Supports vacuum deposition, cleaning, and etching processes.
• Food industry: Essential for food packaging, dehydration, and vacuum drying processes.
• Metallurgical industry: Extracts gas in metallurgical furnaces and labs to stabilize melting processes.
• Laboratory & scientific research: Ideal for vacuum experiments and gas recovery in scientific settings.
• Electronics industry: Used in integrated circuit fabrication, screen vacuum coating, and other electronics manufacturing processes.